Holdings: Polysilicon nanogap fabrication using a thermal oxidation process

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Bibliographic Details
Main Authors:	Dhahi, T.S, Uda, Hashim, Prof. Dr., Md. Eaqub, Ali, Nazwa, Taib
Other Authors:	sthikra@yahoo.com
Format:	Article
Language:	English
Published:	Emerald Group Publishing Limited. 2013
Subjects:	Capacitance Electrodes Microelectronics Nanogap Nanotechnology Photolithography Physical characterization Size reduction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/25642
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