Mask design for the reproducible fabrication and reliable pattern transfer for polysilicon nanowire
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Main Authors: | Tijjani Adam, Shuwa, Uda, Hashim, Prof. Dr., Leow, Pei Ling |
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Other Authors: | tijjaniadam@yahoo.com |
Format: | Working Paper |
Language: | English |
Published: |
Institute of Electrical and Electronics Engineers (IEEE)
2013
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Subjects: | |
Online Access: | http://dspace.unimap.edu.my/xmlui/handle/123456789/22907 |
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