Holdings: Characterization of robust alignment mark to improve alignment performance

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Bibliographic Details
Main Authors:	Normah, Ahmad, Uda, Hashim, Mohd Jefrey, Manaf, Kader, Ibrahim
Format:	Article
Language:	English
Published:	Institute of Electrical and Electronics Engineering (IEEE) 2009
Subjects:	Alignment Alignment mark Alignment performance Alignment signal Overlay Integrated circuit technology Quality control
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/6689
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