Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
This study demonstrates the process development of silicon nanowires (SiNWs) sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. Prior to actual fabrication process, the SiNWs sensor is designed via Elphy Quantum GDS II Editor and AutoCAD. A to...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
Universiti Malaysia Perlis (UniMAP)
2014
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my:80/dspace/handle/123456789/33136 |
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