Holdings: Design and fabricate Mosfet Masks at KUKUM Microfabrication Cleanroom for teaching undergraduates

Organized by Kolej Universiti Kejuruteraan Utara Malaysia (KUKUM), 18th - 19th May 2005 at Putra Palace Hotel, Kangar.

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Bibliographic Details
Main Authors:	Mohd Zainizan, Sahdan, Uda, Hashim, Hashim, Saim, Marlia, Morsin
Format:	Working Paper
Language:	English
Published:	Kolej Universiti Kejuruteraan Utara Malaysia 2009
Subjects:	Mask fabrication Pattern transfer Photolithography AutoCAD MOSFET Mask > Design and construction
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/7133
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