封面圖片

Application of e-beam lithography for nanowire development

International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.

Saved in:

書目詳細資料
Main Authors:	S. Fatimah, Abd Rahman, Uda, Hashim, Prof. Dr., Mohammad Nuzaihan, Md Nor
其他作者:	aeiou_0410@yahoo.co.uk
格式:	Working Paper
語言:	English
出版:	Universiti Malaysia Perlis (UniMAP) 2012
主題:	Semiconductor device Electron beam lithography (EBL) Photolithography Nanowires
在線閱讀:	http://dspace.unimap.edu.my/xmlui/handle/123456789/21642
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

相似書籍

Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process
由: Abd Rahman, S. F., et al.
出版: (2016)

Design and process development of silicon nanowire based DNA biosensor using electron beam lithography
由: Uda, Hashim, et al.
出版: (2009)

Nanowire formation using electron beam lithography
由: Rahman, S. F. A., et al.
出版: (2010)

Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization
由: Uda, Hashim, Prof. Dr.
出版: (2013)

Design and fabrication of silicon nanowire based sensor
由: Siti Fatimah, Abd Rahman, et al.
出版: (2014)

Negative Pattern Scheme (NPS) design for nanowire formation using scanning electron microscope based electron beam lithography technique
由: Mohammad Nuzaihan, Md Nor, et al.
出版: (2014)

Nanowire formation for single electron transistor using SEM based Electron Beam Lithography (EBL) technique: Positive tone vs negative tone e-beam resist
由: Mohammad Nuzaihan, Md Nor, et al.
出版: (2009)

MOS Transistor Mask Design Using SEM Based E-Beam Lithography
由: Uda, Hashim, Prof. Dr., et al.
出版: (2010)

Pattern designed for combination of optical lithography and electron beam lithography
由: S. Fatimah, Abd Rahman, et al.
出版: (2010)

Nanowire conductance biosensor by spacer patterning lithography technique for DNA hybridization detection: Design and fabrication method
由: Uda, Hashim, Prof. Dr., et al.
出版: (2012)

Mask Making Process (Positive and Negative Mask)
由: Uda, Hashim, Prof. Dr., et al.
出版: (2010)

SOI Single-Electron Transistors (SET) design and process development
由: Amiza, Rasmi, et al.
出版: (2009)

Semiconductor Nanowire
由: Uda, Hashim, Prof. Dr., et al.
出版: (2010)

Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method
由: Mohammad Nuzaihan, Md Nor, et al.
出版: (2014)

Fabrication of Silicon Nanowires using Scanning Electron Microscope based Electron Beam Lithography method
由: Mohammad Nuzaihan Md Nor
出版: (2008)

Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
由: Siti Fatimah, Abd Rahman
出版: (2014)

Man-2403 resist development for electron beam lithography process
由: Nur Hamidah, Abdul Halim, et al.
出版: (2010)

Nano patterning of cone dots and nano constrictions of negative e-beam resist for single electron transistor fabrication
由: Sutikno, Madnasri, et al.
出版: (2009)

The Effect of Process Parameters on Metal Step Coverage for Aluminum by Evaporation Technique
由: Noraishah Azman
出版: (2008)

Subnanometer poly-silicon gap structure formation: Comparison study between size expansion and size reduction
由: Uda, Hashim, Prof. Dr., et al.
出版: (2013)

Electron beam lithography solutions concept
由: Anon
出版: (2010)

PMMA characterization and optimization for Nano Structure formation
由: S Niza, Mohammad Bajuri, et al.
出版: (2009)

Optimization of 950K PMMA resists for Nano-application using Statistical Design Expert
由: Khoo Chien Chin
出版: (2008)

Effect of alignment mark architecture on alignment signal behavior in advanced lithography
由: Normah, Ahmad, et al.
出版: (2009)

Electronic transport properties of indium antimonide nanowire clusters synthesized by electrodeposition method
由: Arifin @ Mohd Ripin, Intan Nur Ain
出版: (2019)

Current trend in simulation: A study simulation of Poly-Silicon nanowire using COMSOL multiphysics
由: Uda, Hashim, Prof. Dr., et al.
出版: (2014)

Effect of alignment mark depth on alignment signal behavior in advanced lithography
由: Normah, Ahmad, et al.
出版: (2017)

Nanomaterials: inorganic nanowires
由: Meyyappan, M.
出版: (2010)

Design and fabrication of quantum dot single electron transistor structure using e-beam nanolithography
由: Uda, Hashim, et al.
出版: (2016)

Technology development for nano structure formation: Fabrication and characterization
由: Tijjani Adam, Shuwa, et al.
出版: (2014)

Alignment mark architecture effect on alignment signal behavior in advanced lithography
由: Normah, Ahmad, et al.
出版: (2009)

Fabrication of polysilicon nanowires using trimming technique
由: Uda, Hashim, Prof. Dr., et al.
出版: (2013)

Plant diseases detection using nanowire as biosensor transducer
由: Shahrul Aizzam, Ariffin, et al.
出版: (2014)

Design and fabrication of Nanowire-based conductance biosensor using spacer patterning technique
由: Uda, Hashim, et al.
出版: (2009)

Ohmic contacts optimisation for High-Power InGaAs/AlAs double-barrier resonant tunnelling diodes based on a dual-exposure e-beam lithography approach
由: Cimbri, Davide, et al.
出版: (2022)

Fabrication of polysilicon nanowires using trimming technique
由: Uda, Hashim, Prof. Dr., et al.
出版: (2013)

Fabrication of nanowire using ash trimming technique
由: Tijjani Adam, Shuwa, et al.
出版: (2013)

Brief review on ZnO Synthesis methods, thin film & nanowire gas sensors
由: M., Kashif, et al.
出版: (2012)

The influence of the accelerating voltages on the growth of the square structure during Electron Beam Induced Deposition (EBID) method
由: Muhammad Afiq Abdul Aziz
出版: (2008)

Fabrication of nanowire using ash trimming technique
由: Tijjani Adam, Shuwa, et al.
出版: (2013)