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Application of e-beam lithography for nanowire development

International Postgraduate Conference On Engineering (IPCE 2010), 16th - 17th October 2010 organized by Centre for Graduate Studies, Universiti Malaysia Perlis (UniMAP) at School of Mechatronic Engineering, Pauh Putra Campus, Perlis, Malaysia.

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書誌詳細
主要な著者:	S. Fatimah, Abd Rahman, Uda, Hashim, Prof. Dr., Mohammad Nuzaihan, Md Nor
その他の著者:	aeiou_0410@yahoo.co.uk
フォーマット:	Working Paper
言語:	English
出版事項:	Universiti Malaysia Perlis (UniMAP) 2012
主題:	Semiconductor device Electron beam lithography (EBL) Photolithography Nanowires
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/21642
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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