Influence of substrate temperatures on structural, morphological and optical properties of RF-sputtered anatase Tio 2 films
In this investigation, TiO 2 thin films were deposited on glass substrates at varying substrate temperatures from room temperature to 300 °C by radio-frequency (RF) magnetron sputtering at an elevated sputtering pressure of 3 Pa. As-deposited TiO 2 films were characterized by x-ray diffraction (XRD...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Published: |
Arabian Journal for Science and Engineering
2010
|
| Subjects: | |
| Online Access: | http://eprints.um.edu.my/6767/ http://www.scopus.com/inward/record.url?eid=2-s2.0-79951885229&partnerID=40&md5=857b4e6e0723a98685e24cf6ad71e73e |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|