Synthesis and annealing of nanostructured TiO2 films by radio-frequency magnetron sputtering

• Main Authors: Hasan, M.M., Haseeb, A.S. Md. Abdul, Saidur, Rahman, Masjuki, Haji Hassan, Hamdi, M.
• Format: Article
• Published: Asian Network for Scientific Information 2009
• Subjects: TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/6791/; https://doi.org/10.3923/jas.2009.2815.2821

In this investigation, anatase TiO 2 thin films were deposited on glass substrates at room temperature by RF magnetron sputtering at an elevated sputtering pressure of 3 Pa. The TiO 2 films deposited at room temperature were annealed at different temperatures up to 873°K for 1 h. The TiO 2 films we...