Aluminum-copper bilayers thin films deposited at room temperature by RF magnetron sputtering

• Main Authors: Abdul Halim, Zulhelmi Alif, Mat Yajid, Muhamad Azizi, Mohd. Rosli, Zulkifli, Mohamad Ali, Riyaz Ahmad
• Format: Article
• Language: English
• Published: Trans Tech Publication 2014
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://eprints.utm.my/id/eprint/51753/1/ZulhelmiAlifAbdul2014_Aluminum-copperbilayersthinfilms.pdf; http://eprints.utm.my/id/eprint/51753/; http://dx.doi.org/10.4028/www.scientific.net/AMM.606.105

In this work, the effects of room temperature deposition on the structural properties of Al-Cu bilayers thin films were investigated. The bilayers were sputter deposited by RF magnetron sputtering on Si {100} wafers without substrate heating. The thickness of each layer is approximately 500 nm thick...