Intermixing of metal oxide/Ag/metal oxide nanoscale multilayers prepared by rf reactive magnetron sputtering

• Main Authors: Hasan, M.M., Haseeb, A.S. Md. Abdul, Masjuki, Haji Hassan
• Format: Article
• Published: Maney Publishing 2011
• Subjects: TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery
• Online Access: http://eprints.um.edu.my/5557/; https://doi.org/10.1179/1743294410Y.0000000014

This study mainly aims to evaluate the intermixing between layers during the deposition of dielectric/metal/dielectric nanoscale multilayer coatings. TiO(2) and WO(3) films as dielectric materials are developed using radio frequency reactive magnetron sputtering on unheated soda lime glass substrate...