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Investigating optical properties of ITO thin film grown by RF sputtering

Indium tin oxide (ITO) thin films of different thickness were successfully grown on the corning glass substrate using radio frequency magnetron sputtering technique. All the sample were undergone heat treatment at temperature of 600 ºC for 4 hours inside a furnace. The measurement of the thickness h...

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Bibliographic Details
Main Authors: Abd. Mubin, M. Helmi, Wan Shamsuri, W. N., Ismail, Khamim, Abd. Aziz, M. S., Haider, Zuhaib, Tufail, Kashif, Ali, Jalil
Format: Article
Language:English
Published: Laser Center, Universiti Teknologi Malaysia 2017
Subjects:
QC Physics
Online Access:http://eprints.utm.my/id/eprint/80722/1/JalilAli2017_InvestigatingOpticalPropertiesofITOThinFilm.pdf
http://eprints.utm.my/id/eprint/80722/
http://laser.utm.my/buletinoptik/files/2017/03/2017125-33.pdf
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http://eprints.utm.my/id/eprint/80722/1/JalilAli2017_InvestigatingOpticalPropertiesofITOThinFilm.pdf
http://eprints.utm.my/id/eprint/80722/
http://laser.utm.my/buletinoptik/files/2017/03/2017125-33.pdf

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