Influence of substrate temperatures on structural, morphological and optical properties of RF-sputtered anatase Tio 2 films

In this investigation, TiO 2 thin films were deposited on glass substrates at varying substrate temperatures from room temperature to 300 °C by radio-frequency (RF) magnetron sputtering at an elevated sputtering pressure of 3 Pa. As-deposited TiO 2 films were characterized by x-ray diffraction (XRD...

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Bibliographic Details
Main Authors: Hasan, M.M., Haseeb, A.S. Md. Abdul, Masjuki, Haji Hassan, Saidur, Rahman, Abd Shukor, Mohd Hamdi
Format: Article
Published: Arabian Journal for Science and Engineering 2010
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Online Access:http://eprints.um.edu.my/6767/
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