Optimized scratch adhesion for TiSiN coatings deposited by a combination of DC and RF sputtering

• Main Authors: Bushroa, Abdul Razak, Masjuki, Haji Hassan, Muhamad, Muhamad Rasat, Beake, B.D.
• Format: Article
• Published: Elsevier 2011
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/11825/; http://doi.org/10.1016/j.surfcoat.2011.07.048

This paper outlines an experimental study of the TiSiN coatings deposited using a combination of direct current (DC) and radio frequency (RF) PVD magnetron sputtering (DR-PVD) on high speed steel (HSS) substrates. An L9 Taguchi orthogonal array was used to conduct the experiments for finding the opt...