DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR
This PhD thesis reports the design, modeling, simulation, fabrication and characterization of a novel CMOS-MEMS magnetic field sensor (main device). This sensor consists of two major components, 1) resonating shuttle and 2) set of torsional coils. Each component works as magnetic sensor itself. T...
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis |
| Language: | English |
| Published: |
2015
|
| Subjects: | |
| Online Access: | http://utpedia.utp.edu.my/id/eprint/21549/1/2015%20-ELECTRICAL%20%26%20ELECTRONICS%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20A%20CMOS-MEMS%20STSTIC%20TO%20LOW%20FREQUENCY%20MAGNETIC%20FIELD%20SENSOR%20-%20FAROOQ%20AHMAD.pdf http://utpedia.utp.edu.my/id/eprint/21549/ |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|