Fabrication and characterization of microstacked PZT actuator for MEMS applications

• Main Authors: Sabri, M.F.M., Ono, T., Said, S.M., Kawai, Y., Esashi, M.
• Format: Article
• Language: English
• Published: 2015
• Subjects: T Technology (General); TA Engineering (General). Civil engineering (General); TJ Mechanical engineering and machinery; TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.um.edu.my/13843/1/Fabrication_and_Characterization_of_Microstacked_PZT_Actuator.pdf; http://eprints.um.edu.my/13843/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=6810136&tag=1

A microstacked PZT actuator of dimensions 8 mmx 0.8 mm x 0.4 mm and capable of 2.3-mu m actuation under a voltage of 100 V was fabricated and characterized. This actuator was then integrated into a silicon microstage with dimensions of 20 mm x 20 mm x 0.4 mm requiring actuation by a miniaturized act...