DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR

• Main Author: ,, FAROOQ AHMAD
• Format: Thesis
• Language: English
• Published: 2015
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/id/eprint/21549/1/2015%20-ELECTRICAL%20%26%20ELECTRONICS%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20A%20CMOS-MEMS%20STSTIC%20TO%20LOW%20FREQUENCY%20MAGNETIC%20FIELD%20SENSOR%20-%20FAROOQ%20AHMAD.pdf; http://utpedia.utp.edu.my/id/eprint/21549/

This PhD thesis reports the design, modeling, simulation, fabrication and characterization of a novel CMOS-MEMS magnetic field sensor (main device). This sensor consists of two major components, 1) resonating shuttle and 2) set of torsional coils. Each component works as magnetic sensor itself. The linear response of these devices to a wide range of magnetic fields make them suitable for applications where weak fields require to be measured with high resolution. The working of the main CMOS-MEMS resonant magnetic sensor is based on a shift in resonant frequency of the shuttle in the presence of magnetic field. The flexural beams of the shuttle are designed so that axial forces from the side torsional coils are exerted on them when exposed to the magnetic field. The axial forces causes a positive shift in the resonance frequency of the shuttle. The operation of the resonating shuttle based sensor is based on the differential change in the amplitude of the shuttle and this differential change is sensed by optical sensing method.