Aluminum-copper bilayers thin films deposited at room temperature by RF magnetron sputtering
In this work, the effects of room temperature deposition on the structural properties of Al-Cu bilayers thin films were investigated. The bilayers were sputter deposited by RF magnetron sputtering on Si {100} wafers without substrate heating. The thickness of each layer is approximately 500 nm thick...
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Main Authors: | Abdul Halim, Zulhelmi Alif, Mat Yajid, Muhamad Azizi, Mohd. Rosli, Zulkifli, Mohamad Ali, Riyaz Ahmad |
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Format: | Article |
Language: | English |
Published: |
Trans Tech Publication
2014
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/51753/1/ZulhelmiAlifAbdul2014_Aluminum-copperbilayersthinfilms.pdf http://eprints.utm.my/id/eprint/51753/ http://dx.doi.org/10.4028/www.scientific.net/AMM.606.105 |
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