Effect Of Post-Annealing In Oxygen Environment On Ito Thin Films Deposited Using RF Magnetron Sputtering

• Main Authors: Hamzah, N.A., Asri, R.I.M., Ahmad, M. A., Md Sahar, M. A. A. Z., Waheeda, S. N., Hassan, Z.
• Format: Conference or Workshop Item
• Language: English
• Published: 2019
• Subjects: QC1-999 Physics
• Online Access: http://eprints.usm.my/48902/1/ICoSeMT%202019%20ABSTRACT%20BOOK%2091.pdf; http://eprints.usm.my/48902/

This work demonstrated the effect of post-annealing on electrical and optical properties of indium tin oxide (ITO) thin films. ITO with 100 nm thickness successfully deposited using radio frequency (RF) magnetron sputtering in oxygen-free environment on soda-lime glass substrate without substrate he...