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RF power dependence of ZnO thin film deposited by RF powered Magnetron Sputtering system

This paper investigates the influence of RF power onto structural and optical properties of Zinc Oxide (ZnO) thin films. A series of ZnO thin films was prepared on the glass substrate by RF magnetron sputtering. ZnO is well known for various applications such as varistors, light emitting diode, gas...

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Bibliographic Details
Main Authors: Kelly Miandal, Mui, Li Lam, Farah Lyana Shain, Azmizam Manie, Khairul Anuar Mohamad, Afishah Alias
Format: Article
Language:English
English
Published: 2016
Subjects:
TP Chemical technology
Online Access:https://eprints.ums.edu.my/id/eprint/19133/1/RF%20power%20dependence%20of%20ZnO%20thin%20film%20deposited%20by%20RF%20powered%20Magnetron%20Sputtering%20system.pdf
https://eprints.ums.edu.my/id/eprint/19133/7/RF%20Power%20Dependence%20of%20ZnO%20Thin%20Film%20Deposited.pdf
https://eprints.ums.edu.my/id/eprint/19133/
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https://eprints.ums.edu.my/id/eprint/19133/1/RF%20power%20dependence%20of%20ZnO%20thin%20film%20deposited%20by%20RF%20powered%20Magnetron%20Sputtering%20system.pdf
https://eprints.ums.edu.my/id/eprint/19133/7/RF%20Power%20Dependence%20of%20ZnO%20Thin%20Film%20Deposited.pdf
https://eprints.ums.edu.my/id/eprint/19133/

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