Improving performance in micromachining of silicon wafer using heat-assisted micro electrical discharge method
Microelectrical discharge machining (^EDM) is a non-traditional machining technique that has high potential in the processing of semiconductor materials. This technique can produce complex three-dimensional (3D) shapes without cutting forces, to eliminate the tendency of crack propagation, due to th...
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| Format: | Thesis |
| Language: | English |
| Published: |
2022
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| Online Access: | http://eprints.utm.my/id/eprint/102032/1/NoorDzulaikhaDaudPSKE2022.pdf.pdf http://eprints.utm.my/id/eprint/102032/ http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:149130 |
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