Experimental micromachining of silicon with Nd-YAG laser

• Main Authors: Mon, Thet Thet, Khairul Fikri, Muhammad, Asnul Hadi, Ahmad, Zazuli, Mohid
• Format: Conference or Workshop Item
• Language: English
• Published: 2011
• Subjects: TJ Mechanical engineering and machinery
• Online Access: http://umpir.ump.edu.my/id/eprint/26175/1/Experimental%20Micromachining%20of%20Silicon%20with%20Nd-YAG%20Laser.pdf; http://umpir.ump.edu.my/id/eprint/26175/; https://doi.org/10.4028/www.scientific.net/AMM.83.244

This research centers on experimental laser-micromachining of silicon using solid state pulsed Nd:YAG laser. The laser is equipped with 3-axis controllers with resolution of 1 μm. The main objective is to find out the possibility of using this laser machining system to fabricate a micro feature on s...