Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography
The realization of reliable nanobiosensor devices requires the improvement of fabrication techniques to form the nanometer-sized structures and patterns, which were used to attach nano materials such as DNA for the device elements. This study demonstrates the sensitivity of silicon nanowires (SiNWs)...
Saved in:
Main Authors: | Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hamidon, Mohd Nizar, Mohd Zawawi, Ruzniza, Hashim, Uda |
---|---|
Format: | Conference or Workshop Item |
Language: | English |
Published: |
IEEE
2014
|
Online Access: | http://psasir.upm.edu.my/id/eprint/55666/1/Top-down%20fabrication%20of%20silicon%20nanowire%20sensor%20using%20electron%20beam%20and%20optical%20mixed%20lithography.pdf http://psasir.upm.edu.my/id/eprint/55666/ |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Similar Items
-
Top-down fabrication of single crystal silicon nanowire using optical lithography
by: Za'bah, Nor Farahidah, et al.
Published: (2012) -
Optimization of the process modules for a top-down silicon
nanowire fabrication using optical lithography and
orientation dependent etching
by: Za'bah, Nor Farahidah, et al.
Published: (2013) -
Silicon nanowire sensor by mix and match lithography process: Fabrication and characterization
by: Uda, Hashim, Prof. Dr.
Published: (2013) -
Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method
by: Mohammad Nuzaihan, Md Nor, et al.
Published: (2014) -
Silicon nanowire sensor from electron beam lithography: design, fabrication and characterization
by: Siti Fatimah, Abd Rahman
Published: (2014)