Top-down fabrication of silicon nanowire sensor using electron beam and optical mixed lithography

• Main Authors: Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hamidon, Mohd Nizar, Mohd Zawawi, Ruzniza, Hashim, Uda
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2014
• Online Access: http://psasir.upm.edu.my/id/eprint/55666/1/Top-down%20fabrication%20of%20silicon%20nanowire%20sensor%20using%20electron%20beam%20and%20optical%20mixed%20lithography.pdf; http://psasir.upm.edu.my/id/eprint/55666/

The realization of reliable nanobiosensor devices requires the improvement of fabrication techniques to form the nanometer-sized structures and patterns, which were used to attach nano materials such as DNA for the device elements. This study demonstrates the sensitivity of silicon nanowires (SiNWs)...