Top-down fabrication process for ZNO NWFETS
ZnO NWFETs were fabricated with and without Al2O3 passivation. This was done by developing a new recipe for depositing the thin film of ZnO. By using a high donor concentration of 1.7 x 1018 cm-3 for the thin film, contact resistance values were lowered (passivated device had Rcon = 2.5 x 104 Ω; unp...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
2018
|
| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/83451/1/SuhanaMohamedSultan2018_Top-downfabricationprocess.pdf http://eprints.utm.my/id/eprint/83451/ http://dx.doi.org/10.4028/www.scientific.net/JNanoR.57.77 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|