Design and fabrication of silicon nanowire based sensor

• Main Authors: Abd Rahman, Siti Fatimah, Yusof, Nor Azah, Hashim, Uda, Md Nor, M. Nuzaihan
• Format: Article
• Language: English; English
• Published: Electrochemical Science Group 2013
• Online Access: http://psasir.upm.edu.my/id/eprint/30181/1/Design%20and%20fabrication%20of%20silicon%20nanowire%20based%20sensor.pdf; http://psasir.upm.edu.my/id/eprint/30181/; http://www.electrochemsci.org/list13.htm#issue9

This paper reports the process development of silicon nanowires sensor requires both the fabrication of nanoscale diameter wires and standard integration to CMOS process. By using silicon-on-insulator (SOI) wafer as a starting material, the nanowires is fabricated using a top-down approach which...