Design and analysis of capacitive comb acceleration sensor for automotive applications
In the semiconductor industry, many electrical and electronic applications have been scaled down to the micron and nano scale using various technologies such as VLSI. This can be observed in Moore’s Law where more and more transistors have been fabricated into a single silicon wafer. While integrate...
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| Main Authors: | , , |
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| Format: | Conference or Workshop Item |
| Language: | English |
| Published: |
The Society of Digital Information and Wireless Communications (SDIWC)
2014
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| Online Access: | http://psasir.upm.edu.my/id/eprint/39757/1/39757.pdf http://psasir.upm.edu.my/id/eprint/39757/ http://sdiwc.net/digital-library/web-admin/upload-pdf/00000970.pdf. |
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