Process for the determination of thickness of polymeric microchannels for microfluidic applications

• Main Authors: Md Yunus, Nurul Amziah, Jaafar, Haslina, Green, Nicolas G.
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2011
• Online Access: http://psasir.upm.edu.my/id/eprint/47784/1/Process%20for%20the%20determination%20of%20thickness%20of%20polymeric%20microchannels%20for%20microfluidic%20applications.pdf; http://psasir.upm.edu.my/id/eprint/47784/

We have developed a technique of fabricating device channels for microfludics system by using high performance epoxy polymeric based dry film resists (DFRs). We will use the fabrication method originated in silicon microelectronics fabrication industry. This is because the interest in this industry...