Investigation of the effect of anodization time and annealing temperature on the physical properties of ZrO2 thin film on a Si substrate
Annealing; Grain size and shape; Morphology; Scanning electron microscopy; Silica; Silicon; Sodium hydroxide; Sputtering; Zircon; Zirconia; Annealed samples; Annealing temperatures; Anodization process; Anodization time; Anodizations; Fourier transform infrared microscopies; Scherrer equations; ZrO2...
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| Main Authors: | , , , , , , |
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| Format: | Article |
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Institute of Physics Publishing
2023
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