Microstructural and optical properties of ZrON/Si thin films

• Main Authors: Atuchin, V.V., Kruchinin, V.N., Wong, Y.H., Cheong, K.Y.
• Format: Article
• Published: Elsevier 2013
• Subjects: TA Engineering (General). Civil engineering (General)
• Online Access: http://eprints.um.edu.my/13006/; http://www.sciencedirect.com/science/article/pii/S0167577X13004291; http://dx.doi.org/10.1016/j.matlet.2013.03.100

ZrON/Si(100) layer structure formation has been produced by oxidation/nitridation of sputtered Zr metal in N2O/Ar ambient at 500–900 °C. Micromorphology and structural properties of the films have been evaluated by scanning electron microscopy, atomic force microscopy, and reflection high-energy ele...