Electrical Characteristics of Oxidized/Nitrided Zr Thin Film on Si
In this work, electrical properties of simultaneously oxidized and nitrided sputtered Zr thin film on n-type Si via N2O gas were systematically investigated and charge conduction mechanisms through the oxide were quantitatively analyzed. Effects of simultaneous oxidation and nitridation duration on...
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| Main Authors: | , |
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| Format: | Article |
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Electrochemical Society
2011
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| Online Access: | http://eprints.um.edu.my/12997/ http://jes.ecsdl.org/content/158/12/H1270.abstract http://dx.doi.org/10.1149/2.106112jes |
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