Investigation of the effect of anodization time and annealing temperature on the physical properties of ZrO2 thin film on a Si substrate

• Main Authors: Goh K.H., Lee H.J., Lau S.K., Teh P.C., Ramesh S., Tan C.Y., Wong Y.H.
• 其他作者: 57069579300
• 格式: Article
• 出版: Institute of Physics Publishing 2023

Annealing; Grain size and shape; Morphology; Scanning electron microscopy; Silica; Silicon; Sodium hydroxide; Sputtering; Zircon; Zirconia; Annealed samples; Annealing temperatures; Anodization process; Anodization time; Anodizations; Fourier transform infrared microscopies; Scherrer equations; ZrO2...