Investigation of plasma induced etch damage/changes in AlGaN/GaN HEMTs
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Universiti Malaysia Perlis (UniMAP)
2022
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| Subjects: | |
| Online Access: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/75096 |
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