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Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process

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Main Authors:	Abd Rahman, S. F., Shohini, M. E. A., Uda, Hashim, Mohammad Nuzaihan, Md Nor
其他作者:	aeiou0410@yahoo.co.uk.
格式:	Article
语言:	English
出版:	Universiti Malaysia Perlis 2016
主题:	Nanowires Electron beam lithography Device characteristics
在线阅读:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41223
标签:	添加标签没有标签, 成为第一个标记此记录!

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