Description: Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process

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Bibliographic Details
Main Authors:	Abd Rahman, S. F., Shohini, M. E. A., Uda, Hashim, Mohammad Nuzaihan, Md Nor
Other Authors:	aeiou0410@yahoo.co.uk.
Format:	Article
Language:	English
Published:	Universiti Malaysia Perlis 2016
Subjects:	Nanowires Electron beam lithography Device characteristics
Online Access:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41223
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Summary:	Link to publisher's homepage at http://ijneam.unimap.edu.my/