Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process
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Main Authors: | Abd Rahman, S. F., Shohini, M. E. A., Uda, Hashim, Mohammad Nuzaihan, Md Nor |
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其他作者: | aeiou0410@yahoo.co.uk. |
格式: | Article |
語言: | English |
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Universiti Malaysia Perlis
2016
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在線閱讀: | http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41223 |
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