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Fabrication of nano and micrometer structures using electron beam and optical mixed lithography process

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書誌詳細
主要な著者:	Abd Rahman, S. F., Shohini, M. E. A., Uda, Hashim, Mohammad Nuzaihan, Md Nor
その他の著者:	aeiou0410@yahoo.co.uk.
フォーマット:	論文
言語:	English
出版事項:	Universiti Malaysia Perlis 2016
主題:	Nanowires Electron beam lithography Device characteristics
オンライン･アクセス:	http://dspace.unimap.edu.my:80/xmlui/handle/123456789/41223
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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