Fabrication of silicon nanowires by electron beam lithography and thermal oxidation size reduction method

• Main Authors: Mohammad Nuzaihan, Md Nor, Uda, Hashim, Prof. Dr., Nazwa, Taib, Tijjani Adam, Shuwa
• Other Authors: [e-mail]
• Format: Article
• Language: English
• Published: Trans Tech Publications 2014
• Subjects: Advance nanolithography; Atomic force microscopy (AFM); BOE; EBL; Inductively coupled plasma-reactive ion etching; ma-N2400 negative resist; Silicon nanowire; Size-reduction; Thermal oxidation
• Online Access: http://dspace.unimap.edu.my:80/dspace/handle/123456789/33553

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