Holdings: Silica microchannel fabrication using fluorine based rie with alas a mask

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Bibliographic Details
Main Authors:	Wan Mokhzani, Wan Norhaimi, Retnasamy, Vithyacharan, Zaliman, Sauli, Assoc. Prof. Dr., Taniselass, Steven, Ahmad Husni, Mohd Shapri, Norazeani, Abdul Rahman, Abdul Halis, Abdul Aziz
Other Authors:	wanmokhdzani@unimap.edu.my
Format:	Article
Language:	English
Published:	INSInet Publications 2013
Subjects:	Reactive Ion Etching Process (RIE) Silica microchannel Fabrication process Microfluidics
Online Access:	http://dspace.unimap.edu.my/xmlui/handle/123456789/26628
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