Holdings: Investigation of surface roughness on platinum deposited wafer after reactive ion etching using SF₆+Argon gaseous

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Bibliographic Details
Main Authors:	Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow, Siew Chui, Goh, Khairul Anwar, Mohamad Khazali, Nooraihan, Abdullah
Other Authors:	zaliman@unimap.edu.my
Format:	Article
Language:	English
Published:	Trans Tech Publications 2014
Subjects:	DOE Platinum Reactive Ion Etching (RIE) SF₆+Argon Surface roughness
Online Access:	http://dspace.unimap.edu.my:80/dspace/handle/123456789/33656
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