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Study of the temperature effect on thickness and surface roughness of SiO2

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書誌詳細
第一著者:	Mohd Azdi Asis
その他の著者:	Ruslinda A. Rahim (Advisor)
フォーマット:	Learning Object
言語:	English
出版事項:	Universiti Malaysia Perlis 2008
主題:	Semiconductors Silicon oxide Silicon > Oxidation Integrated circuits > Design and construction
オンライン･アクセス:	http://dspace.unimap.edu.my/xmlui/handle/123456789/1990
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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