Study of the temperature effect on thickness and surface roughness of SiO2

• 主要作者: Mohd Azdi Asis
• 其他作者: Ruslinda A. Rahim (Advisor)
• 格式: Learning Object
• 語言: English
• 出版: Universiti Malaysia Perlis 2008
• 主題: Semiconductors; Silicon oxide; Silicon > Oxidation; Integrated circuits > Design and construction
• 在線閱讀: http://dspace.unimap.edu.my/xmlui/handle/123456789/1990

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