Study of high efficiency, low noise sputtered magnetron's cathode using GaN and SiC semiconductors for modulated microwave power transmission
Semiconductor deposition on magnetron's cathode surface using different materials such as gallium nitride (GaN) and silicon carbide (SiC) semiconductors is conducted to grow approximately 80, 100 and 120 nm plasma layers. The cathode is then used to generate high frequency and low-power microwa...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Cambridge Univ Press
2022
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| Subjects: | |
| Online Access: | http://eprints.um.edu.my/42458/ |
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