Dependence of preferred c-axis orientation on RF magnetron sputtering power for AZO/Si acoustic wave devices

• Main Authors: Md Ralib @ Md Raghib, Aliza 'Aini, Nordin, Anis Nurashikin, Abdul Malik, Noreha, Othman, Raihan
• Format: Conference or Workshop Item
• Language: English; English
• Published: 2015
• Subjects: TK7800 Electronics. Computer engineering. Computer hardware. Photoelectronic devices
• Online Access: http://irep.iium.edu.my/45282/1/45282.pdf; http://irep.iium.edu.my/45282/4/45282_Dependence%20of%20preferred%20c-axis%20orientation_Scopus.pdf; http://irep.iium.edu.my/45282/; http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=7160990

We report the deposition of high quality c-axis oriented Aluminium doped Zinc Oxide (AZO) on silicon substrate for surface acoustic wave (SAW) applications. AZO thin film is prepared by Radio frequency magnetron sputtering method. Sputtering is a preferred method because it is able to perform deposi...