MEMS gas sensors: a review
Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years...
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| Main Authors: | , , , , |
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| Format: | Article |
| Published: |
Institute of Electrical and Electronics Engineers Inc.
2021
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/94263/ http://dx.doi.org/10.1109/JSEN.2021.3091854 |
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