MEMS gas sensors: a review
Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years...
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my.utm.942632022-03-31T15:25:20Z http://eprints.utm.my/id/eprint/94263/ MEMS gas sensors: a review Ahmad Asri, Muhammad Izzudin Hasan, Md. Nazibul Ahmad Fuaad, Mariatul Rawdhah Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan TK Electrical engineering. Electronics Nuclear engineering Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years, several gas sensors have been developed to detect and analyze a wide range of gases. As sensor applications are expected to be further extended in the near future, it is, therefore, essential to review crucial types of gas sensors, their features, challenges, and a range of important applications. This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed. The focus of this review is on applications surrounding the use of electrochemical, optical and acoustic gas sensors for biomedical applications. Institute of Electrical and Electronics Engineers Inc. 2021-09-01 Article PeerReviewed Ahmad Asri, Muhammad Izzudin and Hasan, Md. Nazibul and Ahmad Fuaad, Mariatul Rawdhah and Md. Yunos, Yusri and Mohamed Ali, Mohamed Sultan (2021) MEMS gas sensors: a review. IEEE Sensors Journal, 21 (17). pp. 18381-18397. ISSN 1530-437X http://dx.doi.org/10.1109/JSEN.2021.3091854 DOI:10.1109/JSEN.2021.3091854 |
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TK Electrical engineering. Electronics Nuclear engineering Ahmad Asri, Muhammad Izzudin Hasan, Md. Nazibul Ahmad Fuaad, Mariatul Rawdhah Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan MEMS gas sensors: a review |
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Micro-electromechanical system (MEMS) gas sensors represent a system that is capable of detecting the existence and concentration of gasses in the atmosphere. These sensors have become incredibly popular and have been widely used in a variety of fields, including the biomedical field. Over the years, several gas sensors have been developed to detect and analyze a wide range of gases. As sensor applications are expected to be further extended in the near future, it is, therefore, essential to review crucial types of gas sensors, their features, challenges, and a range of important applications. This paper presents a comprehensive review of the state-of-the-art gas sensors, which have been developed for gas sensing applications using MEMS technology. The working principle, the structure, the sensitive material and the important characteristics of each of these sensors are discussed. The focus of this review is on applications surrounding the use of electrochemical, optical and acoustic gas sensors for biomedical applications. |
format |
Article |
author |
Ahmad Asri, Muhammad Izzudin Hasan, Md. Nazibul Ahmad Fuaad, Mariatul Rawdhah Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan |
author_facet |
Ahmad Asri, Muhammad Izzudin Hasan, Md. Nazibul Ahmad Fuaad, Mariatul Rawdhah Md. Yunos, Yusri Mohamed Ali, Mohamed Sultan |
author_sort |
Ahmad Asri, Muhammad Izzudin |
title |
MEMS gas sensors: a review |
title_short |
MEMS gas sensors: a review |
title_full |
MEMS gas sensors: a review |
title_fullStr |
MEMS gas sensors: a review |
title_full_unstemmed |
MEMS gas sensors: a review |
title_sort |
mems gas sensors: a review |
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Institute of Electrical and Electronics Engineers Inc. |
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2021 |
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http://eprints.utm.my/id/eprint/94263/ http://dx.doi.org/10.1109/JSEN.2021.3091854 |
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