Analysis of micropatterned wireless resonant heaters for wireless-control of MEMS thermal actuators
This paper reports a study on wireless radiofrequency (RF) power transfer to and heat generation in micropatterned coils for wireless control of thermally-driven microdevices. Inductor-capacitor circuits with the planar spiral coils act as RF receivers as well as frequency-sensitive wireless heaters...
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| Main Authors: | , , |
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| Format: | Article |
| Published: |
Springer-Verlag Berlin Heidelberg
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/51837/ http://dx.doi.org/10.1007/s00542-013-1776-1 |
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