Fabrication of ZnO nanowire device using top-down approach

• Main Authors: Mohamed Sultan, Suhana, Sun, K., Partridge, J., Allen, M., Ashburn, P., Chong, H. M. H.
• Format: Book Section
• Published: IEEE Explorer 2011
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://eprints.utm.my/id/eprint/29709/; http://dx.doi.org/10.1109/ULIS.2011.5757956

ZnO nanowire devices were fabricated from top-down using optical lithography. The nanowires are formed from anisotropic etch of 100 nm Filtered Cathodic Vacuum Arc (FCVA) deposited ZnO thin film. The nanowires are characterized using SEM and Raman spectroscopy via image mapping. The current-voltage...