Field effect in silicon nanostructure fabricated by atomic force microscopy nano lithography

• Main Authors: Dehzangi, Arash, Larki, Farhad, Saion, Elias, Hutagalung, Sabar D., Hamidon, Mohd Nizar, Hassan, Jumiah
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2011
• Online Access: http://psasir.upm.edu.my/id/eprint/68199/1/Field%20effect%20in%20silicon%20nanostructure%20fabricated%20by%20atomic%20force%20microscopy%20nano%20lithography.pdf; http://psasir.upm.edu.my/id/eprint/68199/

The electrical property of silicon nano-structure is highly considered in nanoelectronics. In this context we investigate the field effect in nanostructure Junctionless p-type silicon nanowire transistor under the lateral gate voltage. The device fabricated by means of Atomic Force microscopy (AFM)...