Atomic force microscope base nanolithography for reproducible micro and nanofabrication

• Main Authors: Dehzangi, Arash, Larki, Farhad, Yeop Majlis, Burhanuddin, Kazemi, Zainab, Ariannejad, Mohammadmahdi, Abdullah, Ahmad Makarimi, Naseri, Mahmoud Goodarz, Navasery, Manizheh, Saion, Elias, Mohamed Kamari, Halimah, Khalilzadeh, Nasrin, Hutagalung, Sabar D.
• Format: Conference or Workshop Item
• Language: English
• Published: IEEE 2014
• Online Access: http://psasir.upm.edu.my/id/eprint/68131/1/Atomic%20force%20microscope%20base%20nanolithography%20for%20reproducible%20micro%20and%20nanofabrication.pdf; http://psasir.upm.edu.my/id/eprint/68131/

Atomic force microscopy nanolithography (AFM) is a strong fabrication method for micro and nano structure due to its high spatial resolution and positioning abilities. Mixing AFM nanolithography with advantage of silicon-on-insulator (SOI) technology provides the opportunity to achieve more reliable...